? Automatic on-line calibration
? Highly integrated design for double enhancement of module efficiency and installation&commissioning efficiency
? Wide compatibility range, modularized design, easy to changeover
? Adopting high-precision temperature control technology for independent chamber, with high-precision temperature acquisition technology, resulting better chamber temperature unifomity
? Anomaly detection (polarity / probe contact resistance / loop contact resistance / ambient temperature / channel temperature / smoke detection / power shut-off protection)
Items | Parameters |
Temperature Uniformity of Chamber | ±2℃ |
